Secondary Ion Mass Spectrometry (SIMS)
Secondary ion mass spectrometry offers ppm-to-ppb sensitivity for all elements, isotopic analysis, and precise depth profiling. CAMECA SIMS instruments are the reference for semiconductor, geoscience, and advanced materials laboratories.
Overview
In SIMS, a primary ion beam sputters the sample surface and the emitted secondary ions are mass-analyzed, delivering ultra-trace sensitivity for every element from hydrogen to uranium, isotope ratios, and depth profiles with nanometer resolution. The technique is indispensable for dopant profiling in semiconductors, geochronology and cosmochemistry, battery materials, and thin-film development. CAMECA's dynamic SIMS and NanoSIMS instruments define the state of the art in the field.
Manufacturer: CAMECA — France
Authorized distributor in Bangladesh. Factory-trained engineers available for local support.
Models
Magnetic Sector SIMS: IMS 7f-Auto
It is widely used across semiconductor process control, photovoltaic and LED device development, material sciences and environmental studies.
Magnetic Sector SIMS: IMS 7f-GEO
The CAMECA IMS 7f-GEO is a compact, mono-collection magnetic sector Secondary Ion Mass Spectrometer developed specifically for high precision.
Large Geometry SIMS: IMS 1300-HR³
The CAMECA IMS 1300-HR³ is a multicollection Large Geometry Secondary Ion Mass Spectrometer (LG-SIMS) that succeeds the internationally acclaimed IMS 1280-HR.
SIMS for Isotope Geochronology: KLEORA
KLEORA is a specialized secondary ion mass spectrometer (SIMS) from CAMECA, purpose-built for high-throughput U-Th-Pb isotope geochronology.
High-Resolution Nanoanalysis SIMS: NanoSIMS-HR & Cryo
The NanoSIMS-HR is the next-generation secondary ion mass spectrometer in CAMECA's world-renowned NanoSIMS 50/50L series.
SIMS for Materials & Geosciences: NanoSIMS 50L
The NanoSIMS 50L is CAMECA's high-resolution secondary ion mass spectrometer purpose-built for imaging and quantifying trace elements and isotopes at the sub-micron.
Inline Wafer SIMS: AKONIS
It is purpose-built to support demanding SiGe and SiP multilayer stack monitoring for N5 and beyond CMOS processes.
Wafer-Dedicated SIMS: IMS Wf & SC Ultra
The CAMECA IMS Wf and SC Ultra are magnetic sector Secondary Ion Mass Spectrometers dedicated to advanced semiconductor process control and ultra-shallow depth profiling.
Quadrupole Depth Profiler: SIMS 4550
The CAMECA SIMS 4550 is a flexible, quadrupole-based dynamic Secondary Ion Mass Spectrometer built around CAMECA's unique FLIG (Floating Low-energy Ion Gun) technology.
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