Ellipsometers
Ellipsometry measures the change in polarisation of light reflected from a surface to determine film thickness and optical constants with sub-nanometre sensitivity. Park Systems' Accurion instruments add microscopy to the technique, turning ellipsometry into a true imaging method.
Overview
An ellipsometer measures the change in polarisation state of light reflected from a sample and derives film thickness, refractive index, and extinction coefficient from it — non-destructively and without contact. Park Systems' Accurion division pioneered Imaging Ellipsometry, replacing the single-spot detector of a conventional instrument with a microscope objective and camera so that every pixel becomes its own measurement point. That makes it possible to visualise and quantify local variations in thickness and optical properties with lateral resolution down to 1 µm, on samples from 2D materials and graphene to semiconductor wafers, biosensor surfaces, polymer coatings, and optical films. The range spans the flagship EP4 imaging spectroscopic ellipsometer, the referenced RSE for very fast large-area wafer mapping, and the entry-level SIMON.
Manufacturer: Park Systems — South Korea
Local sales, installation, and technical support in Bangladesh by trained local engineers.
Models
Imaging Spectroscopic Ellipsometer: Accurion EP4
Flagship imaging spectroscopic ellipsometer combining ellipsometry, microscopy, and spectroscopy with 1 µm lateral resolution.
Referenced Spectroscopic Ellipsometer: Accurion RSE
Single-shot referenced spectroscopic ellipsometer acquiring 200 full spectra per second for fast large-area thickness mapping.
Imaging Ellipsometer: Accurion SIMON
Entry-level imaging ellipsometer for routine thickness and refractive-index measurement, with resolution down to 1 µm.
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