Field Emission Auger Microprobe: JAMP-9510F

Overview

The JAMP-9510F is a high-specification field emission Auger microprobe combining a Schottky field emission electron gun — also used in JEOL's EPMA instruments for its large, stable probe current — with a hemispherical analyzer (HSA) for high-throughput analysis of chemical bonding states in nano to micro areas. An advanced electron optics system delivers stable SEM performance with 3 nm resolution, while a probe diameter of only 8 nm guarantees fine Auger analysis. Together with a highly precise eucentric specimen stage and a floating-type ion gun, the instrument handles any specimen — from metals to insulators — to obtain both compositional and chemical information.

High-Sensitivity Hemispherical Analyzer with Selectable Resolution

The latest HSA system allows the energy resolution to be adjusted between 0.05% and 0.6% to suit each element, improving map sensitivity up to five times over conventional Auger systems. The high-sensitivity mode acquires trace-element maps with a high signal-to-noise ratio — resolving, for example, the small carbon peak of cementite within a pearlite grain. The high-energy-resolution mode detects small peak shifts caused by chemical state differences, such as the chemical shift of nitrogen between BN and TiN in a cross-section of a cutting tool.

Spectrum Imaging

A newly developed spectrum imaging method captures an electron spectrum for each pixel in the image. Spectra from selected areas and elemental distributions can be extracted after acquisition, like EDS mapping. Because data are acquired over a wide energy range, no element is missed — a fundamental difference from conventional Auger mapping, where elements must be specified in advance. The measuring energy range and energy resolution are freely selectable, and spectrum imaging can be applied not only to elemental analysis but also to reflection electron energy loss spectroscopy (REELS).

Chemical State Analysis with Standard Spectra Database

Chemical state analysis in a nano-area delivers results comparable to XPS. Information about chemical state is contained in Auger peak shifts and shape changes, which the Spectra Investigator peak deconvolution software resolves in one click — without complicated parameter setting — by comparison against JEOL's original library of more than 500 standard spectra covering 140 materials. In depth profiling of lithium-ion battery cathode materials, this deconvolution reveals, for example, lithium enrichment inside particles where Mn²⁺ dominates over Mn⁴⁺.

Non-Conductive Material Analysis

Two key technologies enable Auger analysis of non-conductive materials in minute areas: a neutralization ion gun that irradiates Ar ions of only a few eV at high current, and an eucentric mechanical stage with a tilt angle of 0° to 90°. Together they make charge-free analysis possible on samples such as glass, ceramics, flexible polyimide circuit boards, and PTFE.

Applications

Semiconductor devices: with spatial resolution far beyond SEM-EDS or EPMA, AES resolves elemental and silicon chemical-state maps of device cross-sections at high magnification.

Lithium-ion battery materials: AES detects lithium in oxides and carbonates with high sensitivity, and lithium mapping is performed easily with spectrum imaging.

REELS analysis: reflection electron energy loss spectroscopy characterizes carbon materials — distinguishing graphite from amorphous carbon — and evaluates the bandgap of wide-bandgap semiconductors and insulators.

Expandability

Additional ports accommodate a range of attachments supporting a variety of analyses: a backscattered electron detector (BED), a specimen cooling and fracturing device, a specimen parking unit, a transfer vessel, electron backscatter diffraction (EBSD), and an energy dispersive X-ray spectrometer (EDS).

Specifications for JAMP-9510F Field Emission Auger Microprobe