Auger Microprobe
Auger electron spectroscopy combines surface sensitivity with the high spatial resolution of a focused electron beam. JEOL Auger microprobes analyze the outermost atomic layers of microscopic features – ideal for interfaces, particles, and failure analysis.
Overview
A finely focused electron beam excites Auger electrons whose energies identify the elements in the top few nanometers of the sample. Because the beam can be positioned with nanometer precision, Auger microprobes chemically map individual grains, defects, and contamination sites, and depth profiling with ion sputtering reveals layer structures in coatings and electronic devices. JEOL's field-emission Auger instruments deliver high sensitivity at the smallest analysis areas.
Manufacturer: JEOL — Japan
Authorized distributor in Bangladesh. Factory-trained engineers available for local support.
Models
Field Emission Auger Microprobe: JAMP-9510F
Field-emission Auger microprobe with 3 nm SEI resolution and 8 nm Auger probe for nano-area chemical state analysis.
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