Large Sample AFM: Park NX20

Overview

Park NX20 is a flagship atomic force microscope designed for failure analysis and large-sample research, delivering unmatched accuracy, reliability, and ease of use. As Park Systems' original 200 mm sample AFM, it has earned global recognition in academic and industrial laboratories for precise, repeatable nanoscale measurements across materials science, semiconductors, polymers, and bioengineering.

Outstanding NX Mechanical Design

NX20 features a direct on-axis optical microscope with integrated LED illumination for real-time vision of both probe and sample. A vertically aligned, motorized Z stage and focus stage – software-controlled for automatic tip-to-sample approach – ensure precision and ease of use, and the slide-to-connect AFM head with dove-tail rail allows quick setup. The motorized XY sample stage enables convenient navigation and sequential measurements across multiple coordinates with a fine step resolution of 0.6 µm.

Fast Z Servo and High Resolution

The NX Z scanner, built with a stacked piezo actuator and a strain gauge sensor, delivers fast and precise measurements across a wide range of surfaces, maintaining consistent roughness linearity regardless of scan size. It maintains straightness within 0.1% across the usable range, with out-of-axis motion under 5 nm even at a full 15 µm extension, for reliable, distortion-free nanoscale measurements.

Pre-Mounted Probes and Modular Expansion

Pre-aligned probe chip carriers with kinematic mounting points and magnetic seating make probe exchange reliable and repeatable. Advanced AFM modes are enabled by plugging an option module into the expansion slot – the modular NX design is compatible with options across the product line.

Orthogonal Scan System and True Non-Contact™ Mode

Conventional AFMs with tube scanners suffer from out-of-plane motion and axes crosstalk, resulting in image distortion, especially over large scan areas. Like all Park AFMs, this system employs an advanced orthogonal scan system with a flexure-guided architecture: a 2D flexure scanner moves the sample in the XY plane, while a separate 1D flexure scanner independently controls the probe's Z-axis motion. This separated scanner design ensures highly orthogonal, linear scans with minimal out-of-plane motion, and closed-loop servo control with low-noise sensors delivers precise, repeatable scanning across all axes.

True Non-Contact™ mode is a proprietary technology exclusively offered by Park Systems. It obtains topography by detecting the attractive van der Waals force between the AFM tip and the sample surface, preventing destructive tip-sample interaction during the scan. The result is high-resolution, accurate data with prolonged tip life and preserved sample integrity – even on the most delicate or fragile samples.

Software

Park SmartScan™ is an advanced AFM operating software featuring an elegant, intuitive interface and powerful features designed for superior image quality and an enhanced user experience. Park SmartAnalysis™ complements it with fast image processing, comprehensive data analysis, and efficient result publication.

Specifications for Park NX20