Large Sample AFM: Park NX15

Overview

Park NX15 is a versatile atomic force microscope engineered for dependable performance. Its sample stage accommodates full coverage of wafers up to 150 mm, providing a reliable platform for nanoscale metrology in semiconductor and materials research, as well as polymers and bioengineering.

Outstanding NX Mechanical Design

NX15 is built around improved XY and Z scanner performance: fast Z-servo speed for quick vertical response, improved Z scan straightness for accurate imaging, and precise XY positioning during scans. The NX Z scanner, built with a stacked piezo actuator and a strain gauge sensor, delivers fast and precise measurements across a wide range of surfaces, maintaining consistent roughness linearity regardless of scan size. It maintains straightness within 0.1% across the usable range, with out-of-axis motion under 5 nm even at a full 15 µm extension, for reliable, distortion-free nanoscale measurements.

NX Laser Beam Path and Pre-Mounted Probes

The NX head integrates a superluminescent diode providing low-coherence illumination, guided through precision mirrors to the cantilever and position-sensitive photodetector. Pre-aligned probe chip carriers with kinematic mounting points and magnetic seating ensure reliable, repeatable probe exchange.

Modular Expansion and On-Axis Optics

Advanced AFM modes are enabled by plugging an option module into the expansion slot, compatible with options across the NX product line. The high-power on-axis optical microscope with software-controlled LED illumination provides a clear view of the sample surface.

Orthogonal Scan System and True Non-Contact™ Mode

Conventional AFMs with tube scanners suffer from out-of-plane motion and axes crosstalk, resulting in image distortion, especially over large scan areas. Like all Park AFMs, this system employs an advanced orthogonal scan system with a flexure-guided architecture: a 2D flexure scanner moves the sample in the XY plane, while a separate 1D flexure scanner independently controls the probe's Z-axis motion. This separated scanner design ensures highly orthogonal, linear scans with minimal out-of-plane motion, and closed-loop servo control with low-noise sensors delivers precise, repeatable scanning across all axes.

True Non-Contact™ mode is a proprietary technology exclusively offered by Park Systems. It obtains topography by detecting the attractive van der Waals force between the AFM tip and the sample surface, preventing destructive tip-sample interaction during the scan. The result is high-resolution, accurate data with prolonged tip life and preserved sample integrity – even on the most delicate or fragile samples.

Software

Park SmartScan™ is an advanced AFM operating software featuring an elegant, intuitive interface and powerful features designed for superior image quality and an enhanced user experience. Park SmartAnalysis™ complements it with fast image processing, comprehensive data analysis, and efficient result publication.

Specifications for Park NX15